shallow trench isolation oxide thickness leakage
由EPerrin著作—ThispaperproposesareviewofthevariousconsequencesoftheShallowTrenchIsolation(STI)oxidethicknessvariationsondifferentprocessstepsand.,由LZhangli著作·2011·被引用5次—Gatelengthdependenceoftheshallowtrenchisolationleakagecurrentinan...ST...
Reduction of oxide leakage currents of EEPROM at STI ...
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由MSKim著作·2008·被引用3次—Wepresentanimprovedshallowtrenchisolationprocesstoreduceleakage...Exposedtrenchsurfacewasthenoxidizedat950°Cwith110Å ...
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